An edition of Micromachining and microfabrication process technology IV
(1998)
Micromachining and microfabrication process technology IV
21-22 September, 1998, Santa Clara, California
by James H. Smith
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![Cover of: Micromachining and microfabrication process technology IV by James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].](/images/icons/avatar_book.png){kind=icon}
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Micromachining and microfabrication process technology IV: 21-22 September, 1998, Santa Clara, California
1998, SPIE
in English
0819429708 9780819429704
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Includes bibliographical references and author index.
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- Created April 1, 2008
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| December 2, 2020 | Edited by MARC Bot | import existing book |
| October 10, 2020 | Edited by ImportBot | import existing book |
| August 4, 2020 | Edited by ImportBot | import existing book |
| February 4, 2019 | Edited by MARC Bot | import existing book |
| April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record. |