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"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--
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Previews available in: English
Subjects
Microelectromechanical systems, TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics, TECHNOLOGY & ENGINEERING / Electronics / Digital, TECHNOLOGY & ENGINEERING / Electronics / Microelectronics, Microsystèmes électromécaniques, TECHNOLOGY & ENGINEERING, Electronics, Optoelectronics, Digital, MicroelectronicsEdition | Availability |
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1
Guide to Hands-On MEMS Design and Prototyping
2011, Cambridge University Press
in English
1107645794 9781107645790
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2
Guide to Hands-On MEMS Design and Prototyping
2011, Cambridge University Press
in English
1139114255 9781139114257
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WorldCat
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3
A guide to hands-on MEMS design and prototyping
2011, Cambridge University Press
in English
0521889251 9780521889254
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aaaa
Libraries near you:
WorldCat
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4
Guide to Hands-On MEMS Design and Prototyping
2011, Cambridge University Press
in English
0511984669 9780511984662
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zzzz
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WorldCat
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5
Guide to Hands-On Mems Design and Prototyping
2011, Cambridge University Press
in English
1139116428 9781139116428
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zzzz
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6
Guide to Hands-On MEMS Design and Prototyping
2011, Cambridge University Press
in English
1139118595 9781139118590
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Book Details
Edition Notes
Includes bibliographical references and index.
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Feedback?December 18, 2022 | Edited by MARC Bot | import existing book |
June 30, 2019 | Edited by MARC Bot | import existing book |
July 22, 2011 | Created by LC Bot | import new book |