Device and process technologies for MEMS and microelectronics II

17-19 December, 2001, Adelaide, Australia

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Last edited by MARC Bot
February 18, 2019 | History

Device and process technologies for MEMS and microelectronics II

17-19 December, 2001, Adelaide, Australia

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
538

Buy this book

Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
SPIE proceedings series ;, v. 4592, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4592.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7875 .D48 2001

The Physical Object

Pagination
xi, 538 p. :
Number of pages
538

ID Numbers

Open Library
OL3582956M
Internet Archive
deviceprocesstec4592unse
ISBN 10
0819443220
LCCN
2002280119
OCLC/WorldCat
49052655

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February 18, 2019 Created by MARC Bot import existing book