An edition of Lithography for VLSI (1987)

Lithography for VLSI

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Cover of: Lithography for VLSI by edited by Norman G. Einspruch, R.K. Watts.
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Last edited by MARC Bot
March 11, 2019 | History
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An edition of Lithography for VLSI (1987)

Lithography for VLSI

by and

  • 0 Ratings
  • 1 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Academic Press
Language
English
Pages
361

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Subjects
Very large scale integration, Lithography, Integrated circuits, Printed circuits

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Edition Availability
Cover of: Lithography for VLSI
Lithography for VLSI: VLSI Electronics Microstructure Science
2014, Elsevier Science & Technology Books
in English
Libraries near you: WorldCat
Cover of: Lithography for VLSI
Lithography for VLSI
1987, Academic Press
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographies and index.

Published in
Orlando
Series
VLSI electronics ;, v. 16

Classifications

Dewey Decimal Class
621.381/73 s, 621.381/73
Library of Congress
TK7874 .V56 vol. 16

The Physical Object

Pagination
xi, 361 p. :
Number of pages
361

ID Numbers

Open Library
OL2737642M
ISBN 10
0122341163
LCCN
86032156
Goodreads
5615650

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March 11, 2019 Created by MARC Bot import existing book