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Previews available in: English
Edition | Availability |
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1
VLSI Electronics: Microstructure Science
2014, Elsevier Science & Technology Books
in English
148321771X 9781483217710
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2
VLSI Electronics: Microstructure Science
2014, Elsevier Science & Technology Books
in English
1483217728 9781483217727
|
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Libraries near you:
WorldCat
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3
VLSI Electronics: Microstructure Science
2014, Elsevier Science & Technology Books
in English
1483217698 9781483217697
|
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Libraries near you:
WorldCat
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4
VLSI Electronics: Microstructure Science
2014, Elsevier Science & Technology Books
in English
1483217701 9781483217703
|
zzzz
Libraries near you:
WorldCat
|
5 |
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Book Details
Table of Contents
v. 1-5. [without special titles]
v. 6. Materials and process characterization
v. 7. [without special title]
v. 8. Plasma processing for VLSI
v. 9. [without special title]
v. 10. Surface and interface effects in VLSI
v. 11. GaAs microelectronics
v. 12. Silicon materials
v. 13. Metal-semiconductor contacts and devices
v. 14. VLSI design
v. 15. VLSI metallization
v. 16. Lithography for VLSI
v. 17. VLSI in medicine
v.18. Advanced MOS device physics
19. Advanced CMOS process technology
v. 21. Beam processing technologies
v. 22. VLSI reliability
v. 23. Application specific integrated circuit (ASIC) technology
v. 24. Heterostructures and quantum devices.
Edition Notes
Includes bibliographies and indexes.
Vols. 11-<16 > have imprint: Orlando : Academic Press; v. 17-<19, 21-24> : San Diego : Academic Press.
Beginning with vol. 6, some vols. edited by Norman G. Einspruch with other editors.
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