An edition of Micromachining and microfabrication process technology V
(1999)
Micromachining and microfabrication process technology V
20-22 September, 1999, Santa Clara, California
by James H. Smith
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![Cover of: Micromachining and microfabrication process technology V by James H. Smith, Jean-Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.].](http://covers.openlibrary.org/b/id/1554787-L.jpg)
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Micromachining and microfabrication process technology V: 20-22 September, 1999, Santa Clara, California
1999, SPIE
in English
081943471X 9780819434715
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Includes bibliographic references and author index.
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| July 31, 2020 | Edited by ImportBot | import existing book |
| April 9, 2019 | Created by MARC Bot | import existing book |