An edition of Device and Process Technologies for Mems ,Microelectronics, and Photonics
(2004)
Device and process technologies for MEMS, microelectronics, and photonics III
10-12 December 2003, Perth, Australia
by Jung-Chih Chiao, Alex Hariz, Jamieson, David, and Vijay Varadan
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![Cover of: Device and process technologies for MEMS, microelectronics, and photonics III by Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia).](http://covers.openlibrary.org/b/id/4249870-L.jpg)
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Device and process technologies for MEMS, microelectronics, and photonics III: 10-12 December 2003, Perth, Australia
2004, SPIE
in English
081945169X 9780819451699
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Includes bibliographical references and index.
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| January 8, 2023 | Edited by MARC Bot | import existing book |
| December 8, 2020 | Edited by MARC Bot | import existing book |
| August 1, 2020 | Created by ImportBot | import existing book |