An edition of Micromachining and microfabrication process technology XIV (2009)

Micromachining and microfabrication process technology XIV

27 January 2009, San Jose, California, United States

by , , and

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Micromachining and microfabrication process t ...
Mary Ann Perez-Maher, Jung-Chi ...
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Last edited by MARC Bot
November 14, 2020 | History
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An edition of Micromachining and microfabrication process technology XIV (2009)

Micromachining and microfabrication process technology XIV

27 January 2009, San Jose, California, United States

by , , and

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English

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Subjects
Micromachining, Congresses, Microfabrication, Electromechanical devices, Design and construction, Miniature electronic equipment
Edition Availability
Cover of: Micromachining and microfabrication process technology XIV
Micromachining and microfabrication process technology XIV: 27 January 2009, San Jose, California, United States
2009, SPIE
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 7204, Proceedings of SPIE--the International Society for Optical Engineering -- v. 7204.
Other Titles
Micromachining and microfabrication process technology 14, Micromachining and microfabrication process technology fourteen

Classifications

Library of Congress
QC176.8.M5 M525 2009

The Physical Object

Pagination
1 v. (various pagings)

ID Numbers

Open Library
OL31161485M
ISBN 10
0819474509
ISBN 13
9780819474506
LCCN
2010287958
OCLC/WorldCat
318214136

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