An edition of Fundamentals of microfabrication
(1997)
Fundamentals of microfabrication
by Marc J. Madou
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Previews available in: English
Subjects
Microelectromechanical systems, Industrial applications, Microelectronic packaging, Microelectronics, Machining, Lasers, Design and construction, Integrated circuits, Microstructure, Lasers, industrial applications, TECHNOLOGY & ENGINEERING, Mechanical, Microelectronics--design and construction, Lasers--industrial applications, Integrated circuits--design and construction, Microelectromechanical systems--design and construction, Tk7836 .m33 1997, 621.3815/2Showing 3 featured editions. View all 3 editions?
| Edition | Availability |
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1
Fundamentals of microfabrication: the science of miniaturization
2002, CRC Press
in English
- 2nd ed.
0849308267 9780849308260
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2
Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
2002, Taylor & Francis Group
in English
1482274000 9781482274004
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WorldCat
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3
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Book Details
Edition Notes
Includes bibliographical references (p. 565-569) and index.
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| December 20, 2023 | Edited by ImportBot | import existing book |
| December 16, 2022 | Edited by MARC Bot | import existing book |
| September 15, 2021 | Edited by ImportBot | import existing book |
| September 15, 2021 | Edited by ImportBot | import existing book |
| December 10, 2009 | Created by WorkBot | add works page |