An edition of Plasma processing for VLSI (1984)

Plasma processing for VLSI

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Cover of: Plasma processing for VLSI by edited by Norman G. Einspruch, Dale M. Brown.
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Last edited by MARC Bot
October 28, 2020 | History
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An edition of Plasma processing for VLSI (1984)

Plasma processing for VLSI

by and

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Academic Press
Language
English
Pages
527

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Previews available in: English

Subjects
Plasma (Ionized gases), Very large scale integration, Industrial applications, Integrated circuits

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Edition Availability
Cover of: Plasma Processing for VLSI
Plasma Processing for VLSI
2014, Elsevier Science & Technology Books
in English
Libraries near you: WorldCat
Cover of: Plasma processing for VLSI
Plasma processing for VLSI
1984, Academic Press
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographies and index.

Published in
New York
Series
VLSI electronics ;, v. 8

Classifications

Dewey Decimal Class
621.381/73
Library of Congress
TK7874 .V56 vol. 8

The Physical Object

Pagination
xiv, 527 p. :
Number of pages
527

ID Numbers

Open Library
OL3179753M
Internet Archive
vlsielectronicsm08eins
ISBN 10
0122341082
LCCN
83022351
Library Thing
1452712
Goodreads
3756366

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
October 28, 2020 Edited by MARC Bot import existing book
July 8, 2019 Edited by MARC Bot import existing book
March 11, 2019 Edited by MARC Bot import existing book
July 31, 2010 Edited by IdentifierBot added LibraryThing ID
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record.