An edition of Plasma processing for VLSI (1984)

Plasma processing for VLSI

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Cover of: Plasma processing for VLSI by edited by Norman G. Einspruch, Dale M. Brown.
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Last edited by MARC Bot
March 11, 2019 | History
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An edition of Plasma processing for VLSI (1984)

Plasma processing for VLSI

by and

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Academic Press
Language
English
Pages
527

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Previews available in: English

Subjects
Plasma (Ionized gases), Very large scale integration, Industrial applications, Integrated circuits

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Edition Availability
Cover of: Plasma Processing for VLSI
Plasma Processing for VLSI
2014, Elsevier Science & Technology Books
in English
Libraries near you: WorldCat
Cover of: Plasma processing for VLSI
Plasma processing for VLSI
1984, Academic Press
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Published in

New York

Edition Notes

Includes bibliographies and index.

Series
VLSI electronics ;, v. 8

Classifications

Dewey Decimal Class
621.381/73
Library of Congress
TK7874 .V56 vol. 8

The Physical Object

Pagination
xiv, 527 p. :
Number of pages
527

ID Numbers

Open Library
OL3179753M
Internet Archive
vlsielectronicsm08eins
ISBN 10
0122341082
LCCN
83022351
Library Thing
1452712
Goodreads
3756366

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March 11, 2019 Created by MARC Bot import existing book